A research team has developed a high-resolution imaging method based on extreme short-wave UV light. It can be used to examine internal structures in semiconductors non-destructively, and with nanometer precision.
from Latest Science News -- ScienceDaily https://www.sciencedaily.com/releases/2021/02/210216133430.htm
from Latest Science News -- ScienceDaily https://www.sciencedaily.com/releases/2021/02/210216133430.htm
A sharper look at the interior of semiconductors
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February 17, 2021
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